У ВАС отключен Java Script. Полноценное функционирование сайта НЕ ОБЕСПЕЧЕНО

+375 17 288-09-38 (Fax)
info@belgim.by

Of length in the nanometer range

Established and operated from 2009

 

Metrological characteristics:

• Measurement range from 7 to 1350 nm

• Maximum absolute permissible error Δ = ± (0,5-10) nm.

The standard contains:

а) Measures of width and height (of a grid) TGZ01,TGZ02,TGZ03,TGZ04,TGZ11,TGF11,TGX01, TGX11, TGG01 with the rating height from 18 to 1350nm, manufacturer «Mikromasch», Russia-Estonia.

Grids TGX01/TGX11 Image of a grid performed by scanning microscope

Metrological characteristics of grids TGX01/TGX11

Title
Value
TGX01 TGX11
Step height, mm 1,0 2,0
Step 3,0 mcm ± 8 nm 10,0 mcm ± 8nm
Active area, mm 2х2
Rib bending radius, no more than, nm 5
Chip size, mm 5х5х0,45

 

Grid TGF11 Image of a grid performed by scanning microscope

 

 

 

Metrological characteristics of grid TGF11

Title Value
Active area, mm 3х3
Angle of rib slope 54°44´
Step 10,0 mcm ± 5 nm
Chip size, mm 5х5х0,45

 

Grid TGG01  Image of a grid performed by scanning microscope

Metrological characteristics of grid TGG01

Title Value
Active area, mm 3х3
Rib bending radius, no more than, nm 10
Step 3 mcm ± 5 nm
Vertex angle 70°
Chip size, mm 5х5х0,45

 

 

Grids TGZ01/TGZ02/TGZ03/TGZ04/TGZ11 Image of a grid performed by scanning microscope

Metrological characteristics of grids TGZ

Measure type Step height, mm Step, mcm
TGZ01 18-26±1,0 3,0
TGZ02 98-104±2 3,0
TGZ03 496-503±6 3,0
TGZ04 1000±25 3,0
TGZ11 1350±30 10,0
Active area, mm 3х3
Chip size, mm 5х5х0,45

 

 

б) Step height measures of assembly A with nominal height 7,2 nm, 20,9 nm, 69,0 nm, 295,4 nm, 781,4 nm, manufacturer – Physico-technical institute РТВ, Germany

 

Image of step height measures of assembly A Step height measure of assembly A

Metrological characteristics of step height measure of assembly A

Nominal height of measure, nm Height measurement uncertainty of measure U(k=2,p=95%), nm Chip size
7,2 1,0 5х5
20,9 0,7
69,0 0,9
295,4 1,0
781,4 1,4

 

 

в) lines width measure with the line width from 0.5 to 20 mcm, manufacturer - concern «Planar»

 

Image of line width measure Measure module image

 

 

Metrological characteristics of lines width measure

Title Value
Testing zone size, mm 60 × 60
Lines width (in through-passing and reflected light), mcm 0,5; 0,6; 0,7; 0,8; 0,9; 1,0; 1,5; 2,0; 5,0; 10,0; 20,0; 30,0
Width of lines step, mcm 2; 3; 4; 5; 6
Lines and interval width, mcm 5; 15; 20; 30; 40; 70
Limit deviation of a module size and disposition of elements in module, mcm ± 1,0

Limit dimensional drift, mcm:

up to 1 mcm

up to 2 mcm

up to 5 mcm

up to 30 mcm

 

±0,1

±0,2

±0,5

±1

Bourder unevenness for lines and grooves in the measurement zone, mcm 0,1

 

Stage micrometer image ОМО (on the left) and ОМП (on the right)

 

Metrological characteristics of stage micrometers

Title Value
Length of whole scale 1 ± 0,003
Distance between midpoints of any ten graduation lines, mm  0,1 ± 0,002
Scale mark width, mm 0,002 ± 0,001
Scale off-centering on plate, no more than, mm 1,0
Mark non-parallelity relative to mounting, no more than, mm 0,05

 

 

Standard of length unit in the nanometer range applied for:

• Storages and transmissions of length unit in the nanometer range to working measuring instruments, applied in national economy, for the purpose of guaranteeing measurement reliability and measurement assurance;

• Calibration of scanning sonde-type atomic-force and electronic scanning measuring microscopes.

The standard of length unit in the nanometer range is stored in BelGIM production-research department of geometric quantities measurements, Minsk, Starovilenskiy tract, 93. Contact phone number: 239-23-38, 233-35-82 (A. Demidova, A. Pinchuk).

 

 

Печать
Предпросмотр к печати
About us Standards Tests Conformity attestation Contacts